ECE 5366

Last Updated

  • Schedule of Classes - July 21, 2026 7:07PM EDT

ECE 5366
Nanofabrication and Characterization of Electronics Laboratory

Course information provided by the 2026-2027 Catalog.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.


Prerequisites background equivalent to MSE 5410.

Last 4 Terms Offered 2026SP, 2025FA, 2025SP, 2024FA

View Enrollment Information

Syllabi:

  •   Regular Academic Session.  Combined with: ECE 4361, MSE 5411

  • 1 Credit Graded

  • 14535 ECE 5366   LAB 401

    • M
    • Aug 24 - Dec 7, 2026

    • Xing, H

  • Instruction Mode: In Person

    Department Consent Required (Add)

Syllabi:

  •   Regular Academic Session.  Combined with: ECE 4361, MSE 5411

  • 1 Credit Graded

  • 14536 ECE 5366   LAB 402

  •  
    • T
    • Aug 24 - Dec 7, 2026

    • Xing, H

  • Instruction Mode: In Person

Syllabi:

  •   Regular Academic Session.  Combined with: ECE 4361, MSE 5411

  • 1 Credit Graded

  • 14537 ECE 5366   LAB 403

  •  
    • W
    • Aug 24 - Dec 7, 2026

    • Xing, H

  • Instruction Mode: In Person

Syllabi:

  •   Regular Academic Session.  Combined with: ECE 4361, MSE 5411

  • 1 Credit Graded

  • 14538 ECE 5366   LAB 404

  •  
    • R
    • Aug 24 - Dec 7, 2026

    • Xing, H

  • Instruction Mode: In Person

Syllabi:

  •   Regular Academic Session.  Combined with: ECE 4361, MSE 5411

  • 1 Credit Graded

  • 14539 ECE 5366   LAB 405

  •  
    • F
    • Aug 24 - Dec 7, 2026

    • Xing, H

  • Instruction Mode: In Person